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Ultra-Small Transistor Substrates
Ultrasonic Devices
His new power source for integrated microsystems is a millimeter-sized battery that draws energy from a radioactive isotope and could supply power for several decades. It could find application in implantable medical devices, remote sensors, and other devices where a long-lived battery is desirable. The research team has plans to scale the prototype to even smaller dimensions. His ultrasonic microfluidic system is a transducer array for liquid manipulation that includes a micropump made by bulk piezoelectric actuation of silicon-nitride membranes. The group’s integrated ultrasonic surgical tool sculpts tissue with a high degree of accuracy without the side effects of conventional cutting tools. The new tool could include a sensor to identify tissue type by density. Other areas of his research include MEMSbased sensors designed to be inserted into the body to transmit information to a receiving unit outside the patient, improving the methods for manufacturing nanotubes using ultrasound and MEMS technology, and experimenting with a highly sensitive piezoelectric sensor to replicate the way mosquitoes use vibratory cutting to pierce the skin. |